High vacuum transfer valve

HVTV series

The HVTV series transmission valve is powered by compressed air. By changing the cylinder piston rod to push (pull) the valve core assembly to make linear motion, it controls the opening or closing of the valve plate, thereby cutting off or connecting the air flow in the vacuum system.

  • Stuthings HVTV series transfer valve is a high vacuum type transfer valve.

    HVTV series transfer valve is powered by compressed air. By changing the cylinder piston rod to push (pull) the valve core assembly to make linear motion, it controls the opening or closing of the valve plate, thereby cutting off or connecting the air flow in the vacuum system.

    In semiconductor devices and the like, it is suitable for use as a isolation valve between a load lock chamber and a transfer chamber, and between a transfer chamber and a process chamber.

    This series of transfer valves is made of aluminum or stainless steel, uses Viton seals, and can be used in a variety of high vacuum applications.

    Optional configurations include different materials and flange options, all designed to provide better solutions for the vacuum industry.

Model

  • HVTV series

Drive air source pressure range

  • 3-6 bar

Typical air source pressure

  • 4 bar

Scope of application

  • 1.3×10⁻⁵Pa ⁓ atm

Leak rate

  • 1.3×10⁻¹⁰ Pa·L/S

Sealing material

  • FKM

Resistance to baking temperature

  • 0~120℃

Usage environment

  • Vacuum, inert gas

Maintenance cycle

  • 100,000 times

Installation direction

  • Vertical

Download

Order code

HVTV (High Vacuum Transfer Valve) – Ordering Code

Order code

HVTV (High Vacuum Transfer Valve) – Dimensional Drawing

Dimensions

Features & Benefits

High security

  • Mechanical end-lock mechanism is adopted to keep the door open or closed during emergency stop.

Multiple configurations

  • Configurations include different materials and flange options
  • Lightweight and compact, can be used in a variety of scenarios

Customizable

  • Can be customized according to customer needs to meet customer requirements
  • Aims to solve various complex technical problems for customers and face challenges together
  • High security
  • Multiple configurations
  • Customizable

Sales contact information

+86-15356037097

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