High vacuum ball valve

HVSV series

The HVSV series ball valve is powered by compressed air or a handle. By changing the rotation of the ball, it controls the opening or closing of the valve, thereby cutting off or connecting the air flow in the vacuum system.

  • Stuthings HVSV series ball valve is a special ball valve for the semiconductor field, adapting to the high precision and high cleanliness requirements of semiconductors.

    The HVSV series ball valve uses compressed air or a handle as power to control the opening or closing of the valve by changing the rotation of the ball, thereby cutting off or connecting the air flow.

    This series of ball valves are made of 316L stainless steel and imported sealing components, and are lubricated with imported low-volatile vacuum grease.

    It has a certain self-cleaning ability and can be used in semiconductor corrosion and depositional atmospheres, and in anti-pollution scenarios.

    Optional options include different flange sizes, designed to provide better solutions for the semiconductor industry.

Model

  • HVSV series

Drive air source pressure range

  • 4-8 bar

Typical air source pressure

  • 6 bar

Scope of application

  • 1.3×10⁻⁵Pa ⁓ atm

Leak rate

  • 1.3×10⁻¹⁰ Pa·L/S

Sealing material

  • PTFE、FKM

Working medium temperature

  • 0~120℃

Usage environment

  • Vacuum, inert gas

Maintenance cycle

  • 20,000 times

Download

HVSV (High Vacuum Ball Valve) – Ordering Code

Order code

HVSV (High Vacuum Ball Valve) – Dimensional Drawing

Dimensions

Features & Benefits

Anti-pollution

  • It has certain self-cleaning ability and can be used in anti-pollution scenarios.

Multiple configurations

  • Configurations include different materials and flange options
  • Lightweight and compact, can be used in a variety of scenarios

Customizable

  • Can be customized according to customer needs to meet customer requirements
  • Aims to solve various complex technical problems for customers and face challenges together
  • Anti-pollution
  • Multiple configurations
  • Customizable

Sales contact information

+86-15356037097

Contact us

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