MQC series

• Stuthings MQC Series are high-precision, temperature-compensated gas mass flow controllers.
  
  It is mainly used for precise measurement and control of gas mass flow in semiconductor manufacturing processes.
  
  High-speed response is achieved based on MEMS thermal flow sensor and high-speed response solenoid valve. It also has temperature compensation function.
  
  The indicator light shows the current status.
  
  Minimum setting resolution is 0.05%.
  
  Has good electromagnetic compatibility.
  
  Communication uses the standard Modbus-RTU protocol, which is convenient and simple to operate.

Model

• MQC-021
• MQC-051
• MQC-022
• MQC-023

Control range

• 0.5~20 sccm
• 0.5~50 sccm
• 5~200 sccm
• 50~2000 sccm

Working pressure difference

• 0.2~0.4 MPa

Allowable inlet pressure

• Below 0.5 MPa

Pressure resistant

• 1 MPa

Allowable vibration range

• 0 m/s²

Set resolution

• 0.01 sccm
• 0.01 sccm
• 0.1 sccm
• 1.0 sccm

Accuracy

• (0≤ Q ≤ 50%) ±0.5%F.S.
  
  (50< Q ≤ 100%) ±1%S.P.

Electrical connections

• RJ45 x2（comm.)
  
  4 pin（power and comm.)

Power supply

• DC 24V
  
  300 mA max

Analog output

• Optional

serial output

• RS485 / Modbus RTU

Operating temperature

• -10 ~ 40 ℃

Installation direction

• Level

Calibration gas

• Nitrogen/air

Leak rate

• <5*10⁻⁹ mbar*L/s

• 1. mL/min and L/min represent the volume flow rate per minute converted to 0°C and 101.325 kPa (atmospheric pressure). The controllable flow range varies depending on the gas type.
  
  2. Dry gas that does not contain chlorine, sulfur, acid and other corrosive components. And it is a clean gas that does not contain dust and oil mist.
  
  3. It can also operate below the lower limit of the operating differential pressure, but the controllable flow range becomes smaller.
  
  4. When installed vertically, errors will occur in the measurement values.